Materion Microelectronics & Services crucible liners are manufactured to enhance evaporation performance, tool uptime and protect hearth pockets. The data below reviews our standard crucible liner materials and dimensions. If other materials or sizes are required, please contact a Materion Microelectronics & Services sales representative for further information.
Size | A | B | C | D |
7cc | 1.167 | Ref. | 0.563 | 0.093 |
15cc | 1.480 | Ref. | 0.670 | 0.125 |
25cc | 1.850 | Ref. | 0.680 | 0.093 |
40cc | 2.000 | Ref. | 1.062 | 0.250 |
*PT - Graphite is a substitute for vitreous carbon, glassy carbon and/or pyrolytic graphite.
In some applications a "pre-coniditioning" of the crucible liner has positive effect on thin film properties and process yield. Materion offers this process as a service.
To learn more about Crucible Liners and how it can help your evaporation process by contacting Materion Microelectronics and Services.