Materion Microelectronics & Services crucible liners are manufactured to enhance evaporation performance, tool uptime and protect hearth pockets. The data below reviews our standard crucible liner materials and dimensions. If other materials or sizes are required, please contact a Materion Microelectronics & Services sales representative for further information.

CRUCIBLE LINER DIMENSIONS (INCHES)SIZE

 Size  A  B   C   D 
 7cc 1.167  Ref.  0.563  0.093
 15cc 1.480 Ref.  0.670  0.125 
 25cc  1.850 Ref.  0.680  0.093 
 40cc 2.000 Ref.  1.062  0.250 

COMMON CRUCIBLE LINER MATERIALS

  • Al2O
  • Carbon/Graphite 
  • Copper 
  • Molybdenum 
  • PT - Graphite * 
  • Tantalum 
  • Tungsten 

*PT - Graphite is a substitute for vitreous carbon, glassy carbon and/or pyrolytic graphite. 

CRUCIBLE LINERS 

In some applications a "pre-coniditioning" of the crucible liner has positive effect on thin film properties and process yield.  Materion offers this process as a service.

Contact Materion Microelectronics and Services

To learn more about Crucible Liners and how it can help your evaporation process by contacting Materion Microelectronics and Services.

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